Yuav ua li cas xaiv Graphite haum rau ntab iav CVD txheej tshuab

Hauv float iav ntau lawm, CVD (Chemical Vapor Deposition) txheej txheem yog qhov tseem ceeb rau kev siv cov txheej txheem tshwj xeeb rau iav qhov chaw, txhim kho lawv lub zog ua haujlwm thiab ua haujlwm ntev. Txhawm rau kom cov txheej txheem no ua tau zoo, cov cuab yeej koom nrog, tshwj xeeb yog lub tshuab CVD, xav tau cov ntaub ntawv uas tuaj yeem tiv taus qhov kub thiab txias thiab tshuaj lom neeg. Graphite plays lub luag haujlwm tseem ceeb ntawm no, vim nws muab qhov tsim nyog ua kom sov thiab ruaj khov hauv CVD chamber, ua kom muaj kev ua haujlwm zoo.

Nrog kev paub dhau los hauv kev lag luam ntab iav,SHJ CARBONnkag siab txog lub luag haujlwm tseem ceeb ntawm graphite plays hauv optimizing qhov kev ua tau zoo ntawmCVD tshuab. Hauv tsab xov xwm no, peb yuav qhia koj txog yuav ua li cas xaiv hom graphite zoo rau kojCVD system, tsom rau nws cov khoom tseem ceeb xws li thermal stability thiab corrosion kuj. Peb qhov kev nkag siab yuav pab koj txhim kho kev tsim khoom thiab txo qis sijhawm, ua kom yooj yim dua los xaiv cov ntaub ntawv zoo tshaj plaws rau koj cov kev xav tau.

Xaivhaum graphite rau ntab iav CVD txheej tshuabYuav tsum muaj kev txiav txim siab los ntawm ntau qhov ntev xws li kev ua haujlwm ntawm cov khoom siv, kev tsim qauv, thiab cov txheej txheem sib raug zoo, nrog rau qhov siab - qhov kub thiab txias ntawm ntab iav ntau lawm kab, CVD cov yam ntxwv ntawm cov tshuaj tiv thaiv (xws li, roj faib, zaj duab xis uniformity), thiab cov haujlwm tseem ceeb ntawm graphite (kev txhawb nqa, kev taw qhia ntws, corrosion resistance, thiab lwm yam). Cov ntsiab lus tshwj xeeb yog raws li hauv qab no:

Cov khoom siv ntawm graphite ncaj qha txiav txim siab nws txoj kev ruaj ntseg hauv siab - qhov kub thiab txias CVD ib puag ncig thiab nws cuam tshuam rau txheej txheej zoo. Cov ntsuas hauv qab no yuav tsum tau tsom mus rau:

1. Purity (Cov ntsiab lus carbon)

• Yuav tsum tau:Siab - purity graphite yog qhov nyiam, nrog cov ntsiab lus carbon ntau dua lossis sib npaug rau 99.9%, lossis txawm tias 99.99% lossis siab dua.
• Yog vim li cas:Thaum lub sij hawm CVD txheej txheem, yog graphite muaj impurities (xws li hlau, oxides), lawv yuav volatilize los yog koom nyob rau hauv cov kev tshwm sim ntawm kub kub, ua rau muaj kev tsis xws luag xws li me ntsis thiab xim txawv nyob rau hauv lub iav zaj duab xis (xws li, hlau impurities tej zaum yuav tsim xim muaj kuab paug thaum txheej SiO₂ films). High -purity graphite tuaj yeem txo qhov cuam tshuam tsis zoo.

2. Ceev thiab Porosity

• Yuav tsum tau:High ceev (Ntau dua lossis sib npaug li 1.7 g / cm³) thiab porosity tsawg (tsawg dua lossis sib npaug li 15%).
• Yog vim li cas:High- ntom ntom graphite muaj cov qauv ntom ntom, uas tuaj yeem txo qhov nkag mus ntawm cov tshuaj tiv thaiv roj (xws li SiCl₄, NH₃) mus rau sab hauv ntawm graphite, zam "sab hauv deposition" tshwm sim los ntawm cov roj tshwm sim ntxov ntxov hauv qhov hws, uas yuav ua rau tawg ntawm graphite daim hlau los yog slag ntog kom paug cov iav;Tsawg porosity tuaj yeem txo qhov chaw sib cuag ntawm graphite thiab corrosive gases (xws li HCl, ib qho los ntawm -cov khoom ntawm CVD cov tshuaj tiv thaiv), qeeb tus nqi yaig, thiab txuas ntxiv lub neej kev pab cuam.

3. Thermal Shock Resistance

• Yuav tsum tau:Tsawg thermal expansion coefficient (tsawg dua los yog sib npaug li 2.5 × 10⁻⁶ / degree), tsis muaj kev pheej hmoo tawg nyob rau hauv thaj tsam ntawm chav tsev kub txog 1000 degree.
• Yog vim li cas:Nyob rau hauv ntab iav ntau lawm kab, graphite yuav tsum nyob rau hauv qhov siab - qhov kub thiab txias ib puag ncig ntawm 600-1200℃rau lub sij hawm ntev, thiab tej zaum yuav muaj kev kub ntxhov hauv zos vim yog iav ribbon txav thiab txhaj roj. Graphite daim hlau nrog cov thermal shock tsis zoo yog feem ntau tawg vim thermal stress, ua rau cov kab ntau lawm kaw.

4. Oxidation Resistance

• Yuav tsum tau:Qhov tseem ceeb yog muab rau graphite nrog kev kho saum npoo (xws li silicon carbide SiC txheej) lossis isostatic graphite nrog oxidation zoo heev.
• Yog vim li cas:Thaum qhov kub thiab txias (tshwj xeeb tshaj yog nyob rau hauv lub xub ntiag ntawm oxygen), graphite yog yooj yim oxidized los ua CO / CO₂, uas ua rau nto tev thiab deformation. The SiC coating can form a dense protective layer, increasing the oxidation resistance life of the graphite plate by 3-5 times, which is particularly suitable for processes that require the introduction of oxygen-containing reaction gases (such as O₂ participating in SiO₂ coating).

1. Flatness thiab Dimensional raug

• Yuav tsum tau:Deg flatness yuam kev Tsawg dua los yog sib npaug rau 0.1mm / m, thickness kam rau ua Tsawg dua los yog sib npaug rau ± 0.05mm, parallelism sib txawv nrog cov iav ribbon Tsawg dua los yog sib npaug rau 0.5mm.
• Yog vim li cas:Graphite feem ntau yog siv los ua "phaj qis" lossis roj ntws qhia phaj rau txheej txheej, thiab qhov kev ncua deb ntawm iav ribbon nto yuav tsum nruj nruj (feem ntau 5-20mm). Yog tias qhov flatness tsis zoo, qhov sib nrug me me hauv zos yuav ua rau cov pa roj ntau dhau thiab tso tawm ntau dhau; Qhov loj dhau qhov sib nrug yuav ua rau nyias nyias, thaum kawg ua rau cov yeeb yaj kiab tsis sib xws thiab xim sib txawv.

2. Nto tiav

• Yuav tsum tau:Nto roughness Ra Tsawg dua lossis sib npaug li 1.6μm, tsis muaj qhov pom tseeb khawb lossis burrs.
• Yog vim li cas:Ib tug ntxhib nto yuav ua rau turbulence ntawm cov tshuaj tiv thaiv gases, rhuav tshem lub laminar txaus lub xeev ntawm cov roj ntws (CVD txheej yuav tsum tau ruaj khov laminar flow kom zoo zoo deposition); Nyob rau tib lub sijhawm, qhov kub thiab txias hauv cheeb tsam ntawm burrs lossis protrusions tuaj yeem ua rau muaj qhov tshwm sim ntxov ntxov, ua rau granular impurities txuas rau lub iav nto.

3. Adaptability ntawm Gas Flow Channel

• Yuav tsum tau:Customize grooves, opens, lossis flow guide structures ntawm graphite raws li kev txhaj tshuaj roj ntawm lub tshuab txheej (xws li hom slit, hom ntxeem tau).
• Piv txwv:Yog tias S-zoo li tus qauv cua nkag channel tsim tau txais, qhov loj ntawm cov channel (dav, qhov tob, curvature) ntawm graphite yuav tsum tau ua kom haum cov roj ntws los xyuas kom meej tias cov roj tau sib xyaw ua ke thiab tus nqi ntws zoo sib xws ua ntej mus txog lub iav nto, tsis txhob muaj cov concentration hauv zos.

Cov txheej txheem ntab iav CVD sib txawv (xws li hom zaj duab xis yuav tsum tau coated, cov kab ntau lawm ceev, qhov kub thiab txias) muaj cov kev cai sib txawv rau graphite, uas yuav tsum tau xaiv cov hom phiaj:

1. Hom zaj duab xis

• Txheej oxide zaj duab xis (xws li SiO₂, TiO₂):Cov tshuaj tiv thaiv feem ntau cuam tshuam nrog oxidizing gases (O₂), yog li graphite uas muaj zog oxidation tsis kam (xws li nto -coated SiC) yuav tsum tau xaiv kom tsis txhob oxidation thiab tev ntawm graphite;
• Txheej nitride films (xws li Si₃N₄):Cov tshuaj tiv thaiv roj muaj cov roj alkaline xws li NH₃, yog li graphite yuav tsum tiv taus alkaline yaig, thiab siab - ntom graphite muaj feem ntau;
• Txheej zaj duab xis conductive (xws li ITO):rhiab heev rau impurities (tshwj xeeb tshaj yog hlau ions), yuav tsum tau ultra- siab purity (99.99% los yog ntau tshaj) graphite kom tsis txhob impurities cuam tshuam cov conductivity ntawm zaj duab xis.
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2. Cov kab ntau lawm ceev thiab kub

• Siab -cov kab ntau lawm (piv txwv li, niaj hnub melting muaj peev xwm ntau dua los yog sib npaug rau 600 tons):Graphite yuav tsum tau tiv taus ntau dua thermal loads, thiab qhov tseem ceeb yog muab rau isostatic graphite nrog siab zog (flexural zog Ntau dua los yog sib npaug rau 20MPa) thiab zoo creep kuj (es tsis yog extruded graphite, uas muaj pom tseeb anisotropy thiab nws yog feem ntau deformation ntawm kub kub);
• High -cov txheej txheem kub (xws li, txheej txheej kub ntau dua lossis sib npaug rau 1000degree): Graphite nrog qis thermal poob qis (oxidation poob qis dua lossis sib npaug li 0.5% / h ntawm qhov kub thiab txias), uas tuaj yeem ua kom zoo dua los ntawm SiC txheej lossis impregnated antioxidants (xws li resin).

Nyob rau lub hauv paus ntawm kev ua tau raws li qhov yuav tsum tau ua, nws yog ib qho tsim nyog yuav tsum sib npaug ntawm kev pabcuam lub neej thiab tus nqi:

1. Erosion Resistance thiab hnav tsis kam

• Xaiv graphite nrog qib siab graphitization (Ntau dua lossis sib npaug li 95%), uas muaj cov qauv siv lead ua tiav ntau dua thiab muaj zog tiv thaiv cov tshuaj yaig thiab cov neeg kho tshuab hnav (xws li kev sib txhuam me ntsis nrog cov iav ribbon tsis yooj yim los tsim slag);
• Rau qhov chaw uas raug kev puas tsuaj (xws li nyob ze ntawm lub qhov hluav taws xob roj), kev tsim cov thickening hauv zos los yog inlaying siab - ntom ntom graphite blocks tuaj yeem siv los txuas ntxiv lub neej kev pabcuam tag nrho.

2. Cov nqi ua haujlwm thiab kev saib xyuas

• Qhov tseem ceeb yog muab rau graphite uas yooj yim rau cov txheej txheem precision (xws li isostatic graphite, uas muaj isotropy zoo thiab tuaj yeem ua tiav rau hauv cov qauv nyuaj) kom txo tau cov nqi kho;
• Xav txog kev kho kom zoo: Qee cov graphite daim hlau tuaj yeem rov ua kom tiaj tus los ntawm kev sib tsoo ntawm qhov chaw tsis tas yuav hloov tag nrho, txo cov nqi ntev -.

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• Xaiv cov neeg muag khoom nrog kev paub hauv kev lag luam ntab iav:Lawv cov khoom tau raug txheeb xyuas los ntawm cov kab ntau lawm thiab tuaj yeem muab cov qauv lossis kev hloov kho graphite txuam nrog cov txheej txheem tshwj xeeb;
• Thov cov ntaub ntawv soj ntsuam zoo:Xws li cov ntaub ntawv ntsuam xyuas ntawm cov ntsuas tseem ceeb xws li purity (spectral tsom xam), qhov ntom ntom (txoj kev hloov dej), thermal expansion coefficient (thermomechanical tsom xam);
• Kev sim sim: Conduct me -batch sim los soj ntsuam qhov ruaj khov ntawm graphite hauv cov txheej txheem tiag tiag (xws li seb nws puas tsim cov slag, qhov hloov pauv qhov loj me, thiab cuam tshuam rau cov yeeb yaj kiab zoo) ua ntej kev yuav khoom loj.

Hauv float iav CVD txheej tshuab, cov khoom siv refractory ua haujlwm (xws li cov uas siv rau kev nruam nruam ntev nozzles) yog qhov nyuaj los hloov graphite. Qhov laj thawj tseem ceeb yog tias muaj qhov sib txawv tseem ceeb hauv lawv cov kev xav tau ntawm kev ua haujlwm, qhov chaw ua haujlwm, thiab kev siv ib puag ncig. Cov hauv qab no yog ib qho kev ntsuam xyuas tshwj xeeb los ntawm ob yam: kev ua haujlwm tseem ceeb thiab kev ua haujlwm tau zoo:

Refractories tsis tuaj yeem ua tau raws li cov kev xav tau tshwj xeeb ntawm CVD txheej tshuab

Qhov tseem ceeb ntawm kev ua haujlwm ntawm cov khoom siv refractory (xws li txhuas -carbon, zirconium- carbon refractories) yog qhov kub thiab txias tsis kam (siab tshaj 1500 degree), erosion resistance, thiab thermal shock resistance, tab sis lawv muaj pes tsawg leeg thiab cov yam ntxwv ntawm kev ua tau zoo yog qhov tsis sib haum xeeb nrog cov kev xav tau ntawm ntab iav CVD txheej tshuab rau graphite.

Refractories tsis tuaj yeem hloov mus rau cov haujlwm tseem ceeb ntawm CVD txheej

Hauv float iav CVD txheej tshuab, lub luag haujlwm tseem ceeb ntawm graphite yog "siab-kub tus cab kuj + cov roj ntws ncaj qha + cov tshuaj tiv thaiv ib puag ncig":

• 1. Kev ruaj ntseg sib txawv ntawm qhov kub thiab txias:

- Graphite muaj zog chemical inertness ntawm qhov kub ntawm 600-1200 degree, thiab nws cov oxidation kuj tuaj yeem txhim kho ntxiv los ntawm cov coatings (xws li SiC) kom ruaj khov mus ntev;

- Txawm hais tias cov refractories tuaj yeem tiv taus qhov kub thiab txias, nyob rau hauv ib puag ncig ntawm "siab kub + corrosive gas" hauv CVD, cov khoom siv oxide feem ntau ua rau hnov ​​​​mob, thiab cov qauv yooj yim tawg, tsis tuaj yeem tuav qhov ruaj khov rau lub sijhawm ntev (piv txwv li, aluminium- cov khoom siv carbon siv rau lub taub hau ntev yuav poob ntau tshaj 3020% ntawm lawv qhov hnyav hauv H1020 xuaj moos. huab cua).

• 2. Cov kev cai sib txawv rau "kev huv":

- Cov txheej iav muaj qhov xav tau siab heev rau kev ua kom huv si (tus naj npawb ntawm cov khoom saum toj no 0.1μm ib square meter tau tso cai tsawg dua lossis sib npaug li 10), thiab cov yam ntxwv siab purity thiab qis impurity ntawm graphite yog qhov tseem ceeb lav;

- Cov hlau oxides, silicates, thiab lwm yam impurities muaj nyob rau hauv refractories, nrog rau cov pa phem uas tsim los ntawm volatilization los yog cov tshuaj tiv thaiv nyob rau hauv high kub, tsis tuaj yeem ua tau raws li qhov yuav tsum tau ua kom huv si.

• 3. Lub irreplaceability ntawm structural precision:

- Graphite tuaj yeem ua tiav tiav (xws li isostatic graphite, uas nws cov isotropy ua kom yooj yim rau kev ua cov roj ntws hauv cov kav dej) kom tau raws li cov kev tswj xyuas cov roj ntws raws li CVD;

- Refractories yog nkig thiab nyuaj rau kev ua haujlwm, thiab tsis tuaj yeem ua rau siab - cov qauv qhia kev khiav dej num (xws li slit- hom roj ntws channel), ncaj qha ua rau poob ntawm kev tswj ntawm txheej txheej.

• 4. Functional Refractories hloov tsis tau graphite

Qhov kev ua tau zoo (purity, tshuaj stability, deg precision, thiab lwm yam) ntawm cov khoom siv refractory yog kiag li mismatched nrog cov tub ntxhais xav tau ntawm ntab iav CVD txheej tshuab. Kev hloov pauv yuav ua rau muaj kev poob qis hauv cov yeeb yaj kiab zoo (tus nqi tsis raug nce ntau dua 10 npaug), qhov nce ntawm cov khoom siv tsis ua haujlwm (xws li kev kaw ntau zaus rau kev ntxuav), thiab kev ua haujlwm luv luv (los ntawm 3-6 lub hlis rau graphite mus rau 1-2 lub lis piam), nrog kev lag luam tsis zoo thiab ua tau.

Tam sim no, graphite tseem yog qhov kev xaiv zoo tshaj plaws rau ntab iav CVD txheej tshuab, thiab tsis muaj lwm yam ntaub ntawv (xws li kev ua haujlwm refractories) tuaj yeem hloov pauv nws qhov kev ua tau zoo.

Nws yuav tsum tau hais meej meej tias tag nrho cov khoom tseem ceeb hauv kev sib cuag ncaj qha nrog CVD cov tshuaj tiv thaiv gases (xws li SiCl₄, NH₃) thiab iav qhov chaw (xws li txheej txheej graphite daim hlau, roj ntws qhia daim hlau, lub rooj zaum nozzle) yuav tsum tsis txhob hloov nrog cov ntaub ntawv refractory. Cov laj thawj yog raws li nram no:

• Oxide impurities (xws li Al₂O₃, ZrO₂) nyob rau hauv refractories yuav paug cov zaj duab xis, ua rau muaj kev tsis xws luag xws li me ntsis thiab xim txawv;
• Lawv cov tshuaj lom neeg ruaj khov tsis txaus, thiab lawv muaj feem cuam tshuam nrog cov tshuaj tiv thaiv los ntawm - cov khoom (xws li HCl), ua rau cov khoom tev thiab txo qis kev pab cuam lub neej;
• Surface precision thiab gas permeability tsis tuaj yeem ua tau raws li qhov yuav tsum tau ua ntawm txheej rau cov pa roj sib xws thiab kev huv.

Graphite haum rauntab iav CVD txheej tshuabs yuav tsum ua kom tau raws li plaub qhov kev xav tau ntawm "siab purity, siab ceev, siab precision, thiab muaj zog adaptability": purity kom huv si zaj duab xis, ceev thiab thermal poob siab kuj ua kom siab - kub stability, precision kom coating uniformity, thiab cov txheej txheem compatibility kom tsis tu ncua thiab ua haujlwm ntawm cov kab ntau lawm. Thaum kawg, qhov kev xaiv zoo tshaj plaws yuav tsum tau txiav txim siab los ntawm kev ntsuas kev ua tau zoo thiab kev txheeb xyuas qhov tseeb ua ke nrog cov txheej txheem txheej txheej tshwj xeeb (zaj duab xis hom, qhov kub thiab txias, ceev) thiab cov nqi siv nyiaj.